GOŁĘBIOWSKI J. Fabrication of the membranes on a silicon base for the sensors with the ultrasonic waves Lamba-type generated by using the interdigital transducers. Arch. Acoust. [Internet]. 2000 Jan. 1 [cited 2025 Apr. 26];25(4):479-86. Available from: https://acoustics3.ippt.pan.pl/index.php/aa/article/view/384