GOŁĘBIOWSKI, J. “Fabrication of the Membranes on a Silicon Base for the Sensors With the Ultrasonic Waves Lamba-Type Generated by Using the Interdigital Transducers”. Archives of Acoustics 25, no. 4 (January 1, 2000): 479–486. Accessed April 26, 2025. https://acoustics3.ippt.pan.pl/index.php/aa/article/view/384.