GOŁĘBIOWSKI, J. Fabrication of the membranes on a silicon base for the sensors with the ultrasonic waves Lamba-type generated by using the interdigital transducers. Archives of Acoustics, [S. l.], v. 25, n. 4, 2000. Disponível em: https://acoustics3.ippt.pan.pl/index.php/aa/article/view/384. Acesso em: 13 jan. 2025.