TOUNSI, F.; MEZGHANI, B.; RUFER, L.; MASMOUDI, M. Electroacoustic Analysis of a Controlled Damping Planar CMOS-MEMS Electrodynamic Microphone. Arch. Acoust. 2015, 40 (4), 527–537. https://doi.org/10.1515/aoa-2015-0052.